Track Equipment
Recipe & Data Solutions
- Mark Series
- ARDiMuS^® - Recipe Mgmt
- ARDiMuS^® BU - Data Backup
- Teaching Pendant
- 8X Series
- Recipe Manager
- Host Communication
- Fluid Level Monitoring
Retrofits & Upgrades
- Mark Series
- End Station Additions
- Reduced Resist Consumption
- Auto Size-Change
- Flash Drive Silicon Disk
- [More...]
- 90-S/SE Series
- Reduce Develop/DI Use
- Passive Centering
- [More...]
- 8X Series
- Auto Size Change
- Solvent Vapor Tip Chamber
- [More...]
Spare Parts
Chemical Delivery
- Chemical Cabinets
- Chemical Delivery Systems

Teaching Pendant and ARDiMuS^® BU

A Powerful Combination for Supported TEL Mark Series Track Systems

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Simplified Main Arm Calibration:

Wireless or wired operation
Dramatically reduce teaching time – more than 50%
Facilitates accurate calibrations

Automatically reads existing tool configuration and arm calibration
Allows teaching of x, y, z, theta positions for each arm separately
Complete system re-initialization

Keep Your Critical Track Data Safe:

Fast, reliable and secure data and recipe file backup
Eliminates current floppy disk backup process
Multiple system storage on one unit

Alarm files saved locally; network compatible
Eliminates the loss of critical history information when track disk is full

Minimize Downtime - Efficiently backup or restore track data:

Machine data
Wafer flow/Recipe data

Alarm log files
Entire drive for automatic rebuild