Track Equipment
Software
Kits and Parts
References
- Definitions
- Online RTRM Training

TEL CLEAN TRACK ACT 8

Available as: Certified/Pre-owned or Refurbished

150-200mm wafers
Stacked coaters and developers
Seven-high stacked thermal modules
Proven reliability and process stability for I-Line, 248nm and 193nm processes.

TEL's CLEAN TRACK ACT 8 is a compact high-throughput system with an installed base in the thousands.