Rite Track logo 8655 Rite Track Way
West Chester, Ohio 45069
1-513-881-7820

Navigation

  • Home
  • Products
  • Applications
  • Services
  • Press Room
  • About Us
  • Track Equipment
    • TEL Mark 7/8 & Mk Vz Systems
    • Rite Track 90-S/SE Systems
    • Rite Track 88e/88/86 Systems
  • Recipe & Data Solutions
    • Mark Series
    • ARDiMuS® - Recipe Mgmt
    • ARDiMuS® BU - Data Backup
    • Teaching Pendant
    • 8X Series
    • Recipe Manager
    • Host Communication
    • Fluid Level Monitoring
  • Retrofits & Upgrades
    • Mark Series
    • End Station Additions
    • Reduced Resist Consumption
    • Auto Size-Change
    • Flash Drive Silicon Disk
    • [More...]
    • 90-S/SE Series
    • Reduce Develop/DI Use
    • Passive Centering
    • [More...]
    • 8X Series
    • Auto Size Change
    • Solvent Vapor Tip Chamber
    • [More...]
  • Spare Parts
    • SVG, RT & TEL Mark Parts
    • Repair Depot
    • Refurbished Pumps
  • Chemical Delivery
    • Chemical Cabinets
    • Chemical Delivery Systems

TEL CLEAN TRACK ACT 8

Available as: Brokered As-Is System Only

  • 150-200mm wafers
  • Stacked coaters and developers
  • Seven-high stacked thermal modules
  • Proven reliability and process stability for I-Line, 248nm and 193nm processes.

TEL's CLEAN TRACK ACT 8 is a compact high-throughput system with an installed base in the thousands.

ISO 14001:2004 Certified Copyright © 2010