8655 Rite Track WayWest Chester, Ohio 45069
1-513-881-7820
- Track Equipment
- Software
- Kits and Parts
- References
Circulator Repair
- Superior circulator repair capability for SMC Thermo-con and Komatsu Electronics Circulators
- Repaired with new OEM or equivalent parts
- Repaired to original OEM specifications
- Fully tested under load to original specifications
Reduced Resist Consumption
- Solvent Pre-Wet Addition to Coater
- Programmed stream solvent dispense at wafer center
- Available with any resist pump (no RRC pump/controller required)
- Mark V, Vz, 7/8 versions
Silicon Disk Replacement
- Replacement for Silicon Disk in FC-9821 Ke & Ka controllers
- Replacement for Silicon Disk in FC-9801 X & F controllers
- Eliminates battery back-ups with flash memory technology
WEE Unit Refurbishment
Coming Soon...
Auto Size Change
- Auto Size Change between two sizes
- Lot to lot or wafer to wafer operation with no change required (max 9mm diameter differential)
- Current kits:
- 100 to 109
- Others upon request
Chemical Cabinets
- Configurable Chemical Cabinet – new or re-manufactured
- PLC-driven with a touch-screen color display
- Resist bottle/NP switching and bulk HMDS/Solvent/Developer options
Spin Unit Changes & Additions
- Add spin units to existing tracks for throughput improvement
- Add/ Change Thermal units to improve performance
- Add or modify Pumps to your needs for today's resists
Thermal End Station Addition
- HP/HP or HP/COL option at end of system – opposite C/S
- Internal packaging for COL P.S. units
- 3” to 150mm size options
Syringe Dispense
- 55cc N2 pressurized syringe dispense
- Pressure/time control
- Controlled as one of 4 maximum coater dispenses
Double Side Processing
Reverser, Edge Handling Chuck, & Edge Handling HP
- Add a reverser unit to an open thermal stack area to flip wafer for backside processing
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