9X Retrofit Kits

Rite Track is the owner of the SVG 9X series Intellectual Property, including software. As a result, Rite Track is the only choice for certified OEM compatible upgrades and enhancements. Below is a list of just some of the enhancements Rite Track can provide:

	90-SE Coater Spindle Weight of spindle assembly reduced by 20%. Float introduced for lead nut to prevent binding. Rotation of lead nut prevented to improve repeatability. Super smart ball bushings able to self align. Quick disconnect for chuck vacuum. 90-SE only
Dispense Arm – Improved Packaging x and z guide-rails replaced by precision linear guide rails. Internal wiring on motors.
	Coater Dispense Nozzle Tips Individually replaceable tips Molded parts as opposed to machined units. Easy and inexpensive to replace.
Resist Dispense Tip Assy. Replacement Upgrade older 99-45456-02 coater dispense arms to accept the molded nozzle tips.
	Main Shuttle Improvement Add limit switches to determine number of steps between Switch 1 and Switch 2 Second switch allows for calibration check during operation.
Wafer-handling Passive Centering Available for all chill plates and all stages. Designed for 150mm and 200mm wafers. CP capture range of 9mm Stage capture range of 6mm
	Developer/DI Dispense (Eclipse) Reduction in developer and DI dispense by up to 50%. Reduce defect counts through improved rinsing mechanism. Improved rinsing on edge of 8’’ wafers, compared to dual stream. Uniform develop rates cross wafer. Reduced process time up to 23% 150, 200 mm substrate

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9X Retrofit Kits