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Coater Pivoting Dispense Coater Bottom and Top EBR Coater Catch Cup Rinse |
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Three Pin Upgrade kits with improved stepper motor control on hot plates Proximity Hot Plate Retrofit Kit High Torque Indexers Upgraded Centering for 86 and 88 spin modules |
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Watlow Temperature Controllers for hot plate, vapor prime, and vacuum bake ovens Capacitive Wafer Sensor Kits for indexers Heavy Substrate Upgrades for all modules |
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Exhaust Flow Controllers for coat and develop Immersion Circulators Drain Full Sensors |
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Temperature Control Carts Pull Out Drawers Pressure Canisters |
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New Photoresist Pumps from leading suppliers Rebuilt Photoresist Pumps Catch Cups Submicron Upgrade Kits |
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Size Change Kits Pull-out Drain Box Chemical Cabinets |