Products

Track Equipment

TEL CLEAN TRACK ACT 8 - The TEL CLEAN TRACK ACT 8 is currently only offered as a brokered system, without refurbishment.

TEL CLEAN TRACK MARK SERIES - Rite Track is the only North American/European supplier licensed by TEL to provide Certified/Pre-Owned TEL CLEAN TRACK Mark Vz and 7/8 systems.

90-S/SE Series - The 90-S/SE tracks are robotic handling systems with higher throughput than the 8X Series systems. The 90-S/SE uses the exclusive Multipath™ transfer algorithm and stacked heat/chill modules for maximum throughput for your specific product application.

88e Series - The 88e is a 200mm capable processing tool based on the very successful 88 Series systems. However, we didn’t just “scale-up” the modules, we redesigned the heat/chill stations and the spin stations for optimal processing of the larger substrates. The 88e is targeted for those fabs that need 200mm process capability, but don’t have the budget for the higher priced alternatives. In addition, if your fab is using other 8X equipment, the transition to the 88e is painless.

88 Series - If you need in-line processing with robotic handling, the 88 Series is the system for you. The 88 Series has all the features of the 86 Series with some improvements available only for robotic systems. Rite Track has added exclusive enhancements specifically for fragile substrate processing.

86 Series - The time-proven workhorse of the semiconductor manufacturing industry, the 86 Series track systems are seeing new life in the MEMS, thin film head, and solar cell industries. Rite Track has upgraded the 86 series to sub micron processing capability with the addition of optional features. The 86 series offers one of the most reliable and highest throughput systems in its class. The 86 series is one of the few track systems on the market that can handle square and rectangular substrates.

Software

Recipe Manager - The RITE TRACK Recipe Manager® System (RTRM) allows you to use a simple Windows® based interface to enter and save programs for your RITE TRACK 8X Series track equipment or for your 100% compliant existing 8X track systems

Host Communication Interface - The RITE TRACK Host Communications Interface uses SECSII protocol and the RITE TRACK Recipe Manager® System to pass user specified events and alarms to your host computer.

ARDiMuS^® - Advanced Recipe and Data Management System for TEL MARK tracks improves the recipe, data recording, process data acquisition and user interface capabilities of MARK Vz/7/8 tracks.

Kits and Parts

TEL Retrofit Kits, 9X Retrofit Kits and 8X Retrofit Kits - Rite Track provides the widest availability of Retrofit and Enhancement kits for 8X, 9X and TEL Mark systems in the industry. Our extensive world wide customer base, coupled with our purchase of the 8X/9X track lines from ASML, gives us the ability to continually add new kits based on field experience and customer special requests. Check here frequently for the latest innovations.

Spare Parts - Rite Track is the world’s largest supplier of 8X and 9X spare parts. Many of these parts are available as "used," saving your company additional money while providing the same parts performance guarantee as new parts. Used parts are provided on an as-available basis.

Circuit Board Manufacturing - We provide quick turn around, small board quantities, prototyping, and personalized customer service. There are a lot of board manufacturers for the large-lot customers, we specialize in the customer that needs only a few boards, and needs them quickly. Large orders and small orders receive the same attention.