June 20, 2002

Rite Track to Introduce Mini System at Semicon West

Rite Track, a leading manufacturer of track systems for the semiconductor, MEMS and thin film head industries, today announced the availability of a Mini System. The Mini is ideal for MEMS, R&D, and University fabs that need great process control in a small footprint and are not concerned with high throughput.

The Mini is a manually loaded system, based on modules from either the Rite Track 88e or remanufactured SVG 88 Series, depending on
substrate and process requirements.

“You can configure a mini with a spin station only, a hotplate station only, or with a spin station and hot plate station.” According to Ted Bettes, Senior Product Manager. Bettes continued, “the spin station can have manual centering, single arc automatic centering, or full dual arc centering. It can also be configured as a simple Universal spin station or as a fully configured coat, develop or clean process module.”

Each Mini System is supplied with licensed software and warranty.