TEL クリーントラック

Operations, Programming and Preventative Maintenance
This course provides current and new users of Mark Vz, 7, 8 systems with the skills and knowledge required for proper system operation, programming, and preventative maintenance. Participants receive a system overview, and a safety hazard instruction followed by extensive programming and set-up practice on computer simulators followed by practical exercises on a fully functional system. Finally students get extensive instruction in preventative maintenance tasks.

Mark Vz - Maintenance and Adjustments
This course provides new and current users of TEL CLEAN TRACK MARK Vz equipment with the skills and knowledge for proper system operation, programming, and preventative maintenance. Students receive a system overview, and safety hazard instruction followed by extensive display screen instruction, recipe instruction and practice on a functioning tool. Finally, the students get extensive instruction and hands-on preventative maintenance practice. Course length is five days.

Mark 7/8 - Maintenance and Adjustments
This course provides current and new users of Mark 7/8 systems with the skills and knowledge required for proper system maintenance. Students will begin the course with a review of operations, programming, wafer recovery, and recipe writing. The students will receive intensive instruction on each unit starting with the Carrier Station and continuing with the Mian Arm, Interface, Coater Unit, Developer Unit, Heat Treatment, Temperature and Humidity Control, Wafer Edge Exposure, and concludes with troubleshooting instruction and live practice. The course length is two weeks.