Auto Size-Change

88/88e Auto Size Change

Reduce or eliminate your downtime!

Downtime associated with Track wafer size changeovers can be costly. Upgrade your track with Rite Track's Auto-Size Change retrofit and run two sizes on the same track with no changeover.

Features
  • Run two different wafer sizes with NO changeover
  • Wafer size changes automatically on cassette load
  • Available as a field retrofit to existing SVG/Rite Track OEM-compliant 88 & 88e Systems
  • Available with any Rite Track remanufactured 88 or 88e System
Benefits
  • Increase tool uptime by eliminating time changing wafer sizes on your system
  • Eliminate the need for redundant, size-dedicated production tools
  • Perfect solution for fabs running multiple wafer sizes - R&D, foundry, pilot production, other needs
  • Ideal for processing standard wafer sizes and Silicon-on-Glass or other unique wafer carrier needs
 

Also Available for Mark Systems
Dual Wafer Size

 

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