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SVG 8X Process Improvements

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Rite Track is the owner of the SVG 86 and 88 series Intellectual Property including software. Rite Track is the only choice for certified OEM compatible upgrades and enhancements. As a part of our ongoing support of the 8X platform, Rite track provides a variety of offerings. In addition, our engineering department can customize any changes that you may need. Below is a partial list of enhancements Rite Track can provide:



Integrated Temperature Control Unit

Integrated Temperature Control Unit

  • Provide Temperature control for critical fluids
  • Resist Temperature Control
  • Develop Temperature Control
  • Chill Plate Temperature Control


Programmable Exhaust Flow Control

Improves uniformity by reducing exhaust cooling effect due to high exhaust and misting due to low exhaust
  • Improved Coat / Develop process control
  • Programmed to provide a set minimum exhaust during equipment idle.
  • Alarms if exhaust level too low



Programmable Exhaust Flow Control

Solvent Vapor Tip Chamber


Rite Track Solvent Vapor Tip Chamber

  • Rite Track Design
  • Dispense Tips rest in Solvent-rich environment
  • Minimizes dispense tip drying
  • Contain fumes
  • Self-regulated to prevent overfill


Watlow Temperature Controller Upgrades

  • Upgrade to Watlow temperature controllers for better accuracy
  • Hi Reliability
  • Card Cage Remote Set point



Watlow Temperature Controllers


Fragile Wafer Upgrades - Wafer Edge-Vacuum Arm


Fragile Wafer Upgrades 

We have developed a variety of upgrades through our history to handle event the most fragile substrates including:
  • Precision vacuum regulators
  • Teflon padded or ceramic robotic arms
  • Ceramic hotplate lift pin tips
  • Fixed proximity hot plates
  • Wafer edge-vacuum arms


  
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