Advanced Recipe and Data Management System
ARDiMuS® provides a much-requested expansion of data and recipe management for Mark series owners who want to extend the life, flexibility, and functionality of their tracks. The drag & drop wafer flow, on-screen hot plate data profiling, and host capabilities have made this a big hit already. The ARDiMuS® will auto-configure itself to the Mark system. It offers enhanced operability, including advanced recipe control, password protected screens, and in-situ data monitoring and analysis. Options include a host computer interface, barcode reader for reducing operator errors, and external signal monitoring, including monitor of signals not normally monitored by the Mark Series tracks.
- Auto Configuration
- Flat Panel Touch Screen
- Enhanced Operability
- Enhanced Recipe Control - Mark 7/8 only
- Password Protected Screens
- InSitu Data Monitoring & Analysis
- Host Computer Interface
- Barcode Reader
- Dispense Flow Rate Monitoring for Mark 7/8 - NEW!
+ Interlock thresholds to prevent scrap
+ Monitor dispense volumes for every wafer
+ Identify Problem areas - Record of bad dispenses