Throughput & Availability

Spin End Station Addition

  • Increase throughout of existing tools with minimal footprint addition
  • Coater or Developer at end of system
  • 125 to 200mm size options
  • Mark Vz & Mark 7/8 versions available
 

Thermal End Station Addition

  • HP/HP or HP/COL option at end of system – opposite C/S
  • Internal packaging for COL P.S. units
  • Mark Vz & Mark 7/8 versions available
 

   
 


    




    

Copyright 2012 Rite Track Equipment Services, Inc.