Reduced Resist Consumption

• Solvent Pre-Wet Addition to Coater
• Programmed stream solvent dispense at wafer center
• Available with any resist pump (no RRC pump/controller required)
• Mark V, Vz, 7/8 versions

Syringe Dispense

• 55cc N2 pressurized syringe dispense
• Pressure/time control
• Controlled as one of 4 maximum coater dispenses