100mm - 200mm



Available as: Refurbished

The TEL ACT 8/12 is world-renowned for reliability & performance. Designed for hi-volume production, the ACT 8/12 provides a fab friendly footprint with 7-Tier thermal units and stacked spin modules. It is capable of volume 100mm - 200mm wafer production.
  • Single Wafer/Lot Control
  • Vacuumless Triple Arm Transfer
  • 7-Tier Stacked Thermal Modules
  • Optional 5-Tier Thermal Stack
  • Stacked Spin Stations for 
    Compact Footprint
  • Random-Path Wafer Flows
  • SECS I/II, GEM Compliant


Available as: Refurbished

The CLEAN TRACK MARK 7/8 triple arm transfer increase throughput over competing systems. Four tier stacked hot plates reduce system footprint while enhancing process control. Reduced chemical use makes this one of the lowest cost-of-ownership systems available. 
  • Single Wafer/Lot Control
  • Vacuumless Triple Arm Transfer
  • 4-Tier Stacked Thermal Modules
  • Random-Path Wafer Flows
  • SECS I/II, GEM Compliant


Available as: New or Refurbished

The 9X offers enhanced random-path substrate handling, stacked thermal modules and sub-micron processing capability with features ideal for high and/or low volume environments.

A key automation feature is the MultiPath™ substrate transfer system, maximizing throughput by combining serial and random transfer modes while eliminating bottle necks caused by lengthy process steps. MultiPath also eliminates process control problems by ensuring that serial arms are present for substrate transfer between critical process steps such as post-exposure bake to chill.

Rite Track 88e

Available as: New or Refurbished

The Rite Track 88e design is based on the proven 88 Series platform  and provides cost effective 200mm substrate processing capability with improved process control.

The Rite Track 88e Track System improves on the proven 88 series system by meeting the demanding requirements of 200mm processing while maintaining ease of repair and quick size changes from 100mm to 200mm.

All 88e modules are redesigned, not just "scaled-up", to ensure optimum performance at 200mm.

 A variety of Rite Track exclusive upgrades are available to extend the usefulness of these  popular production systems.
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