TEL ACT 8/TEL ACT 12
Available as: Refurbished
- ACT 8: 100-200mm wafers / ACT 12: 200-300mm wafers
- Stacked coaters and developers
- Seven-high stacked thermal modules
- Proven reliability and process stability for I-Line, 248nm and 193nm processes.
- GEM or SECS capable
TEL ACT 8/12 coat/develop systems are world-renowned for their outstanding performance and reliability. High-speed robotics provide throughputs that meet the demands of most advanced scanners.