TEL ACT 8 / 12

Minimize
   

TEL ACT 8/TEL ACT 12

Available as: Refurbished

  • ACT 8: 100-200mm wafers / ACT 12: 200-300mm wafers
  • Stacked coaters and developers
  • Seven-high stacked thermal modules
  • Proven reliability and process stability for I-Line, 248nm and 193nm processes.
  • GEM or SECS capable

TEL ACT 8/12 coat/develop systems are world-renowned for their outstanding performance and reliability. High-speed robotics provide throughputs that meet the demands of most advanced scanners.

 
  
Copyright 2012 Rite Track Equipment Services, Inc.