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SVG 9O-S/SE
• Random Path Processing
• 100mm - 200mm Round Substrates
• Silicon or Exotic Materials
• Processing to 0.18µm
• I-Line or DUV
• Licensed Software
• Rite Track is Product Line Owner
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Rite Track 88e
• Serial Robotic Arm Transfer
• 100mm - 200mm Round Substrates
• Silicon or Exotic Materials
• Processing to 0.5µm
• I-Line
• Licensed Software
• Rite Track is Product Line Owner
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SVG 88
• Serial Robotic Arm Transfer
• 3" - 6" Round Substrates
• Silicon or Exotic Materials
• Processing to 0.7µm
• I-Line
• Licensed Software
• Rite Track is Product Line Owner |
SVG 86
• Serial Belt Transfer
• 2" - 6" Round Substrates; Squares
• Silicon or Exotic Materials
• Processing to 1.0 µm
• I-Line
• Licensed Software
• Rite Track is Product Line Owner |