MARK Vz / MARK VA

 - 3"-150mm Substrates
 - MK Vz: Up to 120 wph / MK VA Up to 90 wph
 - Single Wafer/Lot Control
 - Two Tier Stacked Thermal Modules
 - Vacuumless Twin Arm Transfer
 - User Friendly, Menu Driven Operator Interface
 - Random-Path Wafer Flows

The MARK Vz/VA features a two tier hot plate system that reduces overall system footprint compared with competitive systems of its class. It is ideal for all substrates, including GaAs and other fragile materials.