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TEL Mark Vz & MARK VA Track Systems

Available as: Certified/Pre-owned or Refurbished

 

MARK Vz / MARK VA

  • 3"-150mm Substrates
  • MK Vz: Up to 120 wph / MK VA Up to 90 wph
  • Single Wafer/Lot Control
  • Two Tier Stacked Thermal Modules
  • Vacuumless Twin Arm Transfer
  • User Friendly, Menu Driven Operator Interface
  • Random-Path Wafer Flows

MARK Vz/VA systems features a two tier hot plate system that reduces overall system footprint compared with competitive systems of its class. It is ideal for all substrates, including GaAs and other fragile materials.

Copyright 2012 Rite Track Equipment Services, Inc.