MARK VA
- 3"-150mm Substrates
- Up to 90 WPM
- Single Wafer/Lot Control
- Stacked Hot Plates
- Vacuumless Twin Arm Transfer
- User Friendly, Menu Driven Operator Interface
TEL’s CLEAN TRACK MARK VA features a two tier hot plate system that reduces overall system footprint compared with competitive systems of its class. It is ideal for all substrates, including GaAs and other fragile materials.
|