Rite Track 88e Track System


Available as: New and Remanufactured

Cost Effective 200mm Processing - 
The Rite Track 88e Track System, a Rite Track design based on the proven 88 Series platform, has evolved significantly. This new system has been enhanced to add 200mm substrate processing capability with improved contamination control, reliability, and process control.

The Rite Track 88e Track System is a Rite Track design. The Rite Track 88e Track System improves on the proven 88 series system by meeting the demanding requirements of 200mm processing while maintaining ease of repair and quick size changes from 100mm to 200mm.

All 88e modules are redesigned, not just "scaled-up", to ensure optimum performance at 200mm.

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